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Subject Heading
- Mikrosystemtechnik 8 Hits
- Mikromechanik 4 Hits
- Niederdruckplasma 2 Hits
- Trockenätzen 2 Hits
- Werkstoff 2 Hits
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13 additional values:
- Glimmentladung 1 Hit
- Greifer 1 Hit
- Hochfrequenzentladung 1 Hit
- Ionenstrahlbearbeitung 1 Hit
- Kaltes Plasma 1 Hit
- Lithografie (Halbleitertechnologie) 1 Hit
- Microelectromechanical systems / Computer simulation 1 Hit
- Miniaturisierung 1 Hit
- Montagegerechte Konstruktion 1 Hit
- Oberflächenanalyse 1 Hit
- Plasmadiagnostik 1 Hit
- Sputtern 1 Hit
- Systemtechnik 1 Hit
16 Hits
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3., vollst. überarb. und erw. Aufl.. - Weinheim: Wiley-VCH, 2005Monograph, Text book, Printed ResourceAccess:
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3. Aufl.. - Berlin [u.a.]: Springer, 2004Monograph, Printed ResourceAccess:
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Boston [u.a.]: Kluwer, c 2003Edited collection, Printed ResourceAccess:
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2. ed.. - Berlin [u.a.]: Springer, 2003Edited collection, Printed ResourceAccess:
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2., erw. Aufl.. - Weinheim [u.a.]: VCH, 1997Monograph, Printed ResourceAccess:
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Berlin [u.a.]: Springer, 1997Monograph, Printed ResourceAccess:
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München [u.a.]: Hanser, 1997Text book, Edited collection, Printed ResourceAccess:
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Als Ms. gedr.. - Düsseldorf: VDI-Verl, 1994Monograph, Academic Publication, Printed ResourceAccess:
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2., völlig neubearb. Aufl.. - Berlin [u.a.]: Springer, 1994Monograph, Printed ResourceAccess:
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Düsseldorf: VDI-Verl, 1993Edited collection, Printed ResourceAccess:
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Weinheim [u.a.]: VCH, 1993Monograph, Printed ResourceAccess:
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Korr. Nachdr.. - Berlin [u.a.]: Springer, 1991Edited collection, Printed ResourceAccess:
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Düsseldorf: VDI-Verl, 1991Conference proceedings, Monograph, Part of a work, Printed ResourceAccess:
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Stuttgart: Teubner, 1991Monograph, Printed ResourceAccess:
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Düsseldorf: VDI-Verl, 1989Conference proceedings, Monograph, Part of a work, Printed ResourceAccess:
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Berlin [u.a.]: Springer, 1989Edited collection, Printed ResourceAccess: