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    Herstellung von Aluminiumnitrid Dünnschichten mittels Magnetron Sputtern auf Diamant für potentielle Pseudo-Surface-Acoustic-Wave-Anwendungen
    von: Dipl.-Ing. Michael Vogel aus: Siegen, Deutschland ; Referent: Prof. Dr. rer. nat. habil. Xin Jiang
    Siegen: Lehrstuhl für Oberflächen- und Werkstofftechnologie, Institut für Werkstofftechnik, Universität Siegen, 2016
    Monograph, Academic Publication, Printed Resource

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