Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (Al<subscript>x</subscript>Ga<subscript>1–x</subscript>)<subscript>2</subscript>O<subscript>3</subscript> Films
In: Journal of Electronic Materials, Jg. 52 (2023-11-01), Heft 11, S. 7429-7437
Online
academicJournal
Zugriff:
Titel: |
Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (Al<subscript>x</subscript>Ga<subscript>1–x</subscript>)<subscript>2</subscript>O<subscript>3</subscript> Films
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Autor/in / Beteiligte Person: | Gao, Yan ; Dong, Haitao ; Zhang, Xiaoke ; Feng, Wenran |
Link: | |
Zeitschrift: | Journal of Electronic Materials, Jg. 52 (2023-11-01), Heft 11, S. 7429-7437 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 0361-5235 (print) ; 1543-186X (print) |
DOI: | 10.1007/s11664-023-10673-7 |
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