Hetero-dielectric macaroni channel cylindrical gate all around field effect transistor (HD-MC CGAA FET) for reduced gate leakage analog applications
In: Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems, Jg. 30 (2024-05-01), Heft 5, S. 599-611
Online
academicJournal
Zugriff:
Titel: |
Hetero-dielectric macaroni channel cylindrical gate all around field effect transistor (HD-MC CGAA FET) for reduced gate leakage analog applications
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Autor/in / Beteiligte Person: | Kaul, Aapurva ; Rewari, Sonam ; Nand, Deva |
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Zeitschrift: | Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems, Jg. 30 (2024-05-01), Heft 5, S. 599-611 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 0946-7076 (print) ; 1432-1858 (print) |
DOI: | 10.1007/s00542-023-05577-9 |
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