The quartz-envelope heater: A new heater for metal-organic chemical vapor deposition systems
In: Journal of Electronic Materials, Jg. 14 (1985-09-01), Heft 5, S. 587-615
Online
academicJournal
Zugriff:
Titel: |
The quartz-envelope heater: A new heater for metal-organic chemical vapor deposition systems
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Autor/in / Beteiligte Person: | Boldish, S. I. ; Ciofalo, J. S. ; Wendt, J. P. |
Link: | |
Zeitschrift: | Journal of Electronic Materials, Jg. 14 (1985-09-01), Heft 5, S. 587-615 |
Veröffentlichung: | 1985 |
Medientyp: | academicJournal |
ISSN: | 0361-5235 (print) ; 1543-186X (print) |
DOI: | 10.1007/bf02654027 |
Sonstiges: |
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