In situ FTIR and surface analysis of the reaction of trimethylgallium and ammonia
In: Journal of Electronic Materials, Jg. 18 (1989-05-01), Heft 3, S. 369-377
Online
academicJournal
Zugriff:
Titel: |
In situ FTIR and surface analysis of the reaction of trimethylgallium and ammonia
|
---|---|
Autor/in / Beteiligte Person: | Mazzarese, D. ; Tripathi, A. ; Conner, W. C. ; Jones, K. A. ; Calderon, L. ; Eckart, D. W. |
Link: | |
Zeitschrift: | Journal of Electronic Materials, Jg. 18 (1989-05-01), Heft 3, S. 369-377 |
Veröffentlichung: | 1989 |
Medientyp: | academicJournal |
ISSN: | 0361-5235 (print) ; 1543-186X (print) |
DOI: | 10.1007/bf02657985 |
Sonstiges: |
|