Compositional variation of microstructure in ion-implanted Al<superscript>x</superscript>Ga<superscript>1-x</superscript>As
In: Journal of Materials Research, Jg. 15 (2000-09-01), Heft 9, S. 2043-2053
Online
academicJournal
Zugriff:
Titel: |
Compositional variation of microstructure in ion-implanted Al<superscript>x</superscript>Ga<superscript>1-x</superscript>As
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Autor/in / Beteiligte Person: | Lagow, B. W. ; Robertson, I. M. ; Rehn, L. E. ; Baldo, P. M. ; Coleman, J. J. ; Yeoh, T. S. |
Link: | |
Zeitschrift: | Journal of Materials Research, Jg. 15 (2000-09-01), Heft 9, S. 2043-2053 |
Veröffentlichung: | 2000 |
Medientyp: | academicJournal |
ISSN: | 0884-2914 (print) ; 2044-5326 (print) |
DOI: | 10.1557/jmr.2000.0293 |
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