Pattern Dependent Modeling for CMP Optimization and Control
In: MRS Online Proceedings Library, Jg. 566 (1999-12-01), Heft 1, S. 197-209
Online
academicJournal
Zugriff:
Titel: |
Pattern Dependent Modeling for CMP Optimization and Control
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Autor/in / Beteiligte Person: | Boning, D. ; Lee, B. ; Oji, C. ; Ouma, D. ; Park, T. ; Smith, T. ; Tugbawa, T. |
Link: | |
Zeitschrift: | MRS Online Proceedings Library, Jg. 566 (1999-12-01), Heft 1, S. 197-209 |
Veröffentlichung: | 1999 |
Medientyp: | academicJournal |
ISSN: | 0272-9172 (print) ; 1946-4274 (print) |
DOI: | 10.1557/proc-566-197 |
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