Einzeltreffer — DigiBib

Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. The interleaved fingers extend at an oblique angle to an Z crystalline axis of the piezoelectric plate.

Titel:	ROTATION IN XY PLANE TO SUPPRESS SPURIOUS MODES IN XBAR DEVICES
Link:	Zum Volltext
Veröffentlichung:	2022
Medientyp:	Patent
Sonstiges:	Nachgewiesen in: USPTO Patent Applications Sprachen: English Document Number: 20220190807 Publication Date: June 16, 2022 Appl. No: 17/687544 Application Filed: March 04, 2022 Claim: 1. A method of fabricating a filter device on a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, the method comprising: forming one or more cavities in the substrate such that respective portions of the piezoelectric plate form one or more diaphragms, each suspended over a respective cavity of the one or more cavities; forming a conductor pattern on the front surface, the conductor pattern including one or more interdigital transducers (IDTs) of a respective one or more resonators, wherein interleaved fingers of the one or more IDTs are disposed on a respective diaphragm of the one or more diaphragms, wherein the piezoelectric plate and the one or more IDTs are configured such that radio frequency signals applied to the one or more IDTs excite respective primary shear acoustic modes in the respective one or more diaphragms, wherein the interleaved fingers of at least one of the one or more IDTs extend at an oblique angle to an Y crystalline axis of the piezoelectric plate, wherein forming one or more cavities comprises forming a plurality of cavities to form a plurality of respective diaphragms, and wherein the interleaved fingers of at least one of the IDTs disposed on a respective one of the plurality of diaphragms extend at an angle different from the interleaved fingers of at least one other of the IDTs disposed on a respective diaphragm of the plurality of diaphragms. Claim: 2. The method of claim 1, wherein the one or more resonators includes a shunt resonator and a series resonator. Claim: 3. The method of claim 1, wherein respective directions of acoustic energy flow of each of the excited primary shear acoustic modes are substantially normal to the surfaces of the piezoelectric plate. Claim: 4. The method of claim 1, wherein a z-axis of the piezoelectric plate is normal to the front and back surfaces. Claim: 5. The method of claim 1, wherein the resonator is a shunt resonator of a ladder filter. Claim: 6. The method of claim 1, wherein the oblique angle is 25 degrees. Claim: 7. The method of claim 1, wherein the piezoelectric plate is formed of lithium niobite. Claim: 8. The method of claim 7, further comprising a front-side dielectric layer formed on the front surface of the lithium niobate plate between the fingers of the IDT. Claim: 9. The method of claim 7, wherein a thickness between the front and back surfaces of the lithium niobate plate is greater than or equal to 200 nm and less than or equal to 1000 nm. Claim: 10. A filter device comprising: a substrate having a surface; a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate, portions of the piezoelectric plate forming one or more diaphragms, each spanning a respective cavity of the one or more cavities in the substrate; and a conductor pattern formed on the front surface, the conductor pattern including one or more interdigital transducers (IDTs) of a respective one or more resonators, wherein interleaved fingers of the one or more IDTs is disposed on a respective diaphragm of the one or more diaphragms, wherein the piezoelectric plate and the one or more IDTs are configured such that respective radio frequency signals applied to the one or more IDTs excite respective shear primary acoustic modes in the respective one or more diaphragms, wherein the interleaved fingers of at least one of the one or more IDTs extend at an oblique angle to an Y crystalline axis of the piezoelectric plate, wherein the one or more cavities comprise a plurality of cavities forming a plurality of respective diaphragms, and wherein the interleaved fingers of at least one of the IDTs disposed on a respective one of the plurality of diaphragms extend at an angle different from the interleaved fingers of at least one other of the IDTs disposed on a respective diaphragm of the plurality of diaphragms. Claim: 11. The filter device of claim 10, wherein the one or more resonators includes a shunt resonator and a series resonator. Claim: 12. The filter device of claim 10, wherein respective directions of acoustic energy flow of each of the excited primary shear acoustic modes are substantially normal to the surfaces of the piezoelectric plate. Claim: 13. The filter device of claim 10, wherein a z-axis of the piezoelectric plate is normal to the front and back surfaces. Claim: 14. The filter device of claim 10, wherein the resonator is a shunt resonator of a ladder filter. Claim: 15. The filter device of claim 10, wherein the oblique angle is 25 degrees. Claim: 16. The filter device of claim 10, wherein the piezoelectric plate is formed of lithium niobite. Claim: 17. The filter device of claim 16, further comprising a front-side dielectric layer formed on the front surface of the lithium niobate plate between the fingers of the IDT. Claim: 18. The filter device of claim 16, wherein a thickness between the front and back surfaces of the lithium niobate plate is greater than or equal to 200 nm and less than or equal to 1000 nm. Current International Class: 03; 03; 03; 03

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ROTATION IN XY PLANE TO SUPPRESS SPURIOUS MODES IN XBAR DEVICES