Einzeltreffer — DigiBib

A U-shaped groove and a V-shaped groove are formed onto a cladding disposed on a substrate, a core and a metal structure are formed inside the grooves, respectively, and then the substrate surface is planarized. Further, after a cladding is formed again, the substrate is cut and the cut surface is polished such that the metal structure inside the V-shaped groove has a predetermined thickness, thereby forming a scattering body.

Titel:	METHOD OF MANUFACTURING NEAR-FIELD LIGHT GENERATING ELEMENT AND NEAR-FIELD LIGHT GENERATING ELEMENT
Autor/in / Beteiligte Person:	SHINOHARA, Yoko ; Chiba, Norio ; Oumi, Manabu ; Hirata, Masakazu ; Tanabe, Sachiko ; Tanaka, Yoshikazu
Link:	Zum Volltext
Veröffentlichung:	2012
Medientyp:	Patent
Sonstiges:	Nachgewiesen in: USPTO Patent Applications Sprachen: English Document Number: 20120206032 Publication Date: August 16, 2012 Appl. No: 13/369488 Application Filed: February 09, 2012 Claim: 1. A method of manufacturing a near-field light generating element, comprising: a cladding forming process that forms a cladding onto a substrate; a first groove forming process that forms a first groove on the cladding; a second groove forming process that forms a second groove in the longitudinal direction of the first groove on the cladding; a metal structure forming process that forms a metal structure inside the first groove; a core forming process that disposes a core made of a material having a larger refraction index than the cladding, inside the second groove; and a scattering body forming process that forms a scattering body by cutting the metal structure to be perpendicular to the substrate plane and polishing the cut surface. Claim: 2. The method according to claim 1, wherein the first groove is formed by pressure-welding a first pattern, which corresponds to the first groove, onto the cladding, in the first groove forming process. Claim: 3. The method according to claim 1, further comprising a resist forming process that forms a resist on the cladding after the cladding forming process, wherein a groove shaped substantially the same as the first groove is formed on the resist by pressure-welding the first pattern, which corresponds to the first groove, onto the resist, and the first groove is formed on the cladding by etching the groove shaped substantially the same as the first groove, in the first groove forming process. Claim: 4. The method according to claim 1, wherein the first groove forming process forms the first groove with a dicing blade. Claim: 5. The method according to claim 1, wherein the second groove is formed by pressure-welding a second pattern, which corresponds to the second groove, onto the cladding, in the second groove forming process. Claim: 6. The method according to claim 1, further comprising: a planarizing process that planarizes the core; and a process of forming an over-cladding onto the planarized core, after the core forming process. Claim: 7. The method according to claim 1, wherein an electric resistor is disposed into the metal structure, and the cut surface of the metal structure is polished in accordance with the resistance value of the electric resistor which is changed by applying electricity to the electric resistor, in the scattering body forming process. Claim: 8. A near-field light generating element manufactured by the method of manufacturing a near-field light generating element according to claim 1. Current U.S. Class: 313/110 Current International Class: 01; 01

Klicken Sie ein Format an und speichern Sie dann die Daten oder geben Sie eine Empfänger-Adresse ein und lassen Sie sich per Email zusenden.

BibTeX Citavi, JabRef, u.a.
(Literaturverwaltung)

PDF kein Volltext!
(Merkzettel, Notizen)

RIS Endnote, Citavi u.a.
(Literaturverwaltung)

MODS
(XML zur Weiterverarbeitung)

oder

Wählen Sie das für Sie passende Zitationsformat und kopieren Sie es dann in die Zwischenablage, lassen es sich per Mail zusenden oder speichern es als PDF-Datei.

Gewünschter Zitations-Stil:

oder

Bitte prüfen Sie, ob die Zitation formal korrekt ist, bevor Sie sie in einer Arbeit verwenden. Benutzen Sie gegebenenfalls den "Exportieren"-Dialog, wenn Sie ein Literaturverwaltungsprogramm verwenden und die Zitat-Angaben selbst formatieren wollen.

METHOD OF MANUFACTURING NEAR-FIELD LIGHT GENERATING ELEMENT AND NEAR-FIELD LIGHT GENERATING ELEMENT