Optical microcantilever, manufacturing method thereof, and optical microcantilever holder
2007
Online
Patent
Zugriff:
An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6.
Titel: |
Optical microcantilever, manufacturing method thereof, and optical microcantilever holder
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Autor/in / Beteiligte Person: | Niwa, Takashi ; Kato, Kenji ; Ichihara, Susumu ; Chiba, Norio ; Mitsuoka, Yasuyuki ; Oumi, Manabu ; Kasama, Nobuyuki |
Link: | |
Veröffentlichung: | 2007 |
Medientyp: | Patent |
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