The influence of TMGa pre-flow time and amount as surfactant on the structural and optical properties of AlN epilayer
In: Micro and Nanostructures, Jg. 168 (2022-08-01)
academicJournal
Zugriff:
Titel: |
The influence of TMGa pre-flow time and amount as surfactant on the structural and optical properties of AlN epilayer
|
---|---|
Autor/in / Beteiligte Person: | Yolcu, Gamze ; Simsek, Irem ; Kekul, Reyhan ; Altuntas, Ismail ; Horoz, Sabit ; Demir, Ilkay |
Zeitschrift: | Micro and Nanostructures, Jg. 168 (2022-08-01) |
Veröffentlichung: | 2022 |
Medientyp: | academicJournal |
ISSN: | 2773-0123 (electronic) |
DOI: | 10.1016/j.micrna.2022.207301 |
Sonstiges: |
|