A high accuracy measurement method based on vortex polar axis rotation phase-shifting interferometry (VPAR-PSI)
In: Heliyon, Jg. 9 (2023-06-01), Heft 6
Online
academicJournal
Zugriff:
Titel: |
A high accuracy measurement method based on vortex polar axis rotation phase-shifting interferometry (VPAR-PSI)
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Autor/in / Beteiligte Person: | Li, Zhisong ; Sun, Jiaxing ; Xu, Xiao ; Chen, Yu ; Hu, Honglei |
Link: | |
Zeitschrift: | Heliyon, Jg. 9 (2023-06-01), Heft 6 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 2405-8440 (electronic) |
DOI: | 10.1016/j.heliyon.2023.e16509 |
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