Deposition of GaN films on (1 1 1) Si substrates by alternate supply of TMG and NH 3
In: Optical Materials, Jg. 24 (2004), Heft 4, S. 615-619
Online
academicJournal
Zugriff:
Titel: |
Deposition of GaN films on (1 1 1) Si substrates by alternate supply of TMG and NH 3
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Autor/in / Beteiligte Person: | Gong, Jyh-Rong ; Yeh, Ming-Fa ; Tsai, Yu-Li |
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Zeitschrift: | Optical Materials, Jg. 24 (2004), Heft 4, S. 615-619 |
Veröffentlichung: | 2004 |
Medientyp: | academicJournal |
ISSN: | 0925-3467 (electronic) |
DOI: | 10.1016/S0925-3467(03)00164-2 |
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