Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle deposition
In: Thin Solid Films, Jg. 534 (2013-05-01), S. 275-281
Online
academicJournal
Zugriff:
Titel: |
Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle deposition
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Autor/in / Beteiligte Person: | Charles, Cédric ; Martin, Nicolas ; Devel, Michel ; Ollitrault, Julien ; Billard, Alain |
Link: | |
Zeitschrift: | Thin Solid Films, Jg. 534 (2013-05-01), S. 275-281 |
Veröffentlichung: | 2013 |
Medientyp: | academicJournal |
ISSN: | 0040-6090 (electronic) |
DOI: | 10.1016/j.tsf.2013.03.004 |
Sonstiges: |
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