Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering
In: Thin Solid Films, Jg. 520 (2012-08-31), Heft 21, S. 6709-6717
Online
academicJournal
Zugriff:
Titel: |
Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering
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Autor/in / Beteiligte Person: | Borges, J. ; Martin, N. ; Barradas, N.P. ; Alves, E. ; Eyidi, D. ; Beaufort, M.F. ; Riviere, J.P. ; Vaz, F. ; Marques, L. |
Link: | |
Zeitschrift: | Thin Solid Films, Jg. 520 (2012-08-31), Heft 21, S. 6709-6717 |
Veröffentlichung: | 2012 |
Medientyp: | academicJournal |
ISSN: | 0040-6090 (electronic) |
DOI: | 10.1016/j.tsf.2012.06.062 |
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