Hafnia and alumina stacks as UTBOXs in silicon-on insulator
In: Solid State Electronics, Jg. 168 (2020-06-01)
Online
academicJournal
Zugriff:
Titel: |
Hafnia and alumina stacks as UTBOXs in silicon-on insulator
|
---|---|
Autor/in / Beteiligte Person: | Popov, V.P. ; Antonov, V.A. ; Gutakovskiy, A.K. ; Tyschenko, I.E. ; Vdovin, V.I. ; Miakonkikh, A.V. ; Rudenko, K.V. |
Link: | |
Zeitschrift: | Solid State Electronics, Jg. 168 (2020-06-01) |
Veröffentlichung: | 2020 |
Medientyp: | academicJournal |
ISSN: | 0038-1101 (electronic) |
DOI: | 10.1016/j.sse.2019.107734 |
Sonstiges: |
|