First-principles and thermodynamic analysis of trimethylgallium (TMG) decomposition during MOVPE growth of GaN
In: Journal of Crystal Growth, Jg. 468 (2017-06-15), S. 950-953
Online
academicJournal
Zugriff:
Titel: |
First-principles and thermodynamic analysis of trimethylgallium (TMG) decomposition during MOVPE growth of GaN
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Autor/in / Beteiligte Person: | Sekiguchi, K. ; Shirakawa, H. ; Yamamoto, Y. ; Araidai, M. ; Kangawa, Y. ; Kakimoto, K. ; Shiraishi, K. |
Link: | |
Zeitschrift: | Journal of Crystal Growth, Jg. 468 (2017-06-15), S. 950-953 |
Veröffentlichung: | 2017 |
Medientyp: | academicJournal |
ISSN: | 0022-0248 (electronic) |
DOI: | 10.1016/j.jcrysgro.2016.12.044 |
Sonstiges: |
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