Elaboration of Graded Band-Gap a-SiC Thin-Film Using RF Magnetron Sputtering Technique
In: 36th Symposium on Microelectronics Technology (SBMICRO); (2022-08-22) S. 1-4
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Zugriff:
Titel: |
Elaboration of Graded Band-Gap a-SiC Thin-Film Using RF Magnetron Sputtering Technique
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Autor/in / Beteiligte Person: | Djeffal, F. ; Bendjerad, A. ; Benhaya, A. ; Ferhati, H. |
Link: | |
Quelle: | 36th Symposium on Microelectronics Technology (SBMICRO); (2022-08-22) S. 1-4 |
Veröffentlichung: | 2022 |
Medientyp: | Konferenz |
ISBN: | 978-1-6654-8714-6 (print) |
DOI: | 10.1109/SBMICRO55822.2022.9881037 |
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