Low Resistance Ohmic Contact on Epitaxial MOVPE Grown β-Ga2O3 and β-(AlxGa1−x)2O3 Films
In: IEEE Electron Device Letters, Jg. 43 (2022-10-01), Heft 10, S. 1649-1652
Online
academicJournal
Zugriff:
Titel: |
Low Resistance Ohmic Contact on Epitaxial MOVPE Grown β-Ga2O3 and β-(AlxGa1−x)2O3 Films
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Autor/in / Beteiligte Person: | Alema, F. ; Peterson, C. ; Bhattacharyya, A. ; Roy, S. ; Krishnamoorthy, S. ; Osinsky, A. |
Link: | |
Zeitschrift: | IEEE Electron Device Letters, Jg. 43 (2022-10-01), Heft 10, S. 1649-1652 |
Veröffentlichung: | 2022 |
Medientyp: | academicJournal |
ISSN: | 0741-3106 (print) ; 1558-0563 (print) |
DOI: | 10.1109/LED.2022.3200862 |
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