A comprehensive “big-data-based” monitoring system for yield enhancement in semiconductor man ufacturing
In: International Symposium on Semiconductor Manufacturing (ISSM); (2016-12-01) S. 1-3
Online
Konferenz
Zugriff:
Titel: |
A comprehensive “big-data-based” monitoring system for yield enhancement in semiconductor man ufacturing
|
---|---|
Autor/in / Beteiligte Person: | Nakata, Kouta ; Orihara, Ryohei ; Mizuoka, Yoshiaki ; Takagi, Kentaro |
Link: | |
Quelle: | International Symposium on Semiconductor Manufacturing (ISSM); (2016-12-01) S. 1-3 |
Veröffentlichung: | 2016 |
Medientyp: | Konferenz |
ISBN: | 978-1-5090-4511-2 (print) |
DOI: | 10.1109/ISSM.2016.7934510 |
Sonstiges: |
|