Selective Area Growth Of GaAs and AlGaAs with TMGa, TMAI, AsH/sub 3/ and HCI by Atmospheric Pressure MOVPE
In: Sixth International Conference Metalorganic Vapor Phase Epitaxy; (1992) S. 99-99
Online
Konferenz
Zugriff:
Titel: |
Selective Area Growth Of GaAs and AlGaAs with TMGa, TMAI, AsH/sub 3/ and HCI by Atmospheric Pressure MOVPE
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Autor/in / Beteiligte Person: | Korte, L. ; Thanner, C. |
Link: | |
Quelle: | Sixth International Conference Metalorganic Vapor Phase Epitaxy; (1992) S. 99-99 |
Veröffentlichung: | 1992 |
Medientyp: | Konferenz |
ISBN: | 0-87942-652-7 (print) ; 978-0-87942-652-1 (print) |
DOI: | 10.1109/MOVPE.1992.664959 |
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