Numerical strategies for the prediction of patterned wafer warpage during manufacturing process
In: 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE); (2024-04-07) S. 1-6
Online
Konferenz
Zugriff:
Titel: |
Numerical strategies for the prediction of patterned wafer warpage during manufacturing process
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Autor/in / Beteiligte Person: | Roqueta, Fabrice ; Boutaleb, Mohamed ; Nguyen, Phuc Viet Khoa ; Mencik, Jean-Mathieu |
Link: | |
Quelle: | 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE); (2024-04-07) S. 1-6 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-9363-7 (print) |
ISSN: | 2833-8596 (print) |
DOI: | 10.1109/EuroSimE60745.2024.10491558 |
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