Comprehensive Study of Hydrogen Gas Sensing Performance of an Amorphous In-Al-Zn-O (a-IAZO) Thin Film Synthesized With Pd Nanoparticles
In: IEEE Transactions on Electron Devices, Jg. 70 (2023-09-01), Heft 9, S. 4837-4842
Online
academicJournal
Zugriff:
Titel: |
Comprehensive Study of Hydrogen Gas Sensing Performance of an Amorphous In-Al-Zn-O (a-IAZO) Thin Film Synthesized With Pd Nanoparticles
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Autor/in / Beteiligte Person: | Niu, J. ; Peng, R. ; Chiu, C. ; Tsai, J. ; Hsu, W. ; Lin, K. ; Liu, W. |
Link: | |
Zeitschrift: | IEEE Transactions on Electron Devices, Jg. 70 (2023-09-01), Heft 9, S. 4837-4842 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 0018-9383 (print) ; 1557-9646 (print) |
DOI: | 10.1109/TED.2023.3298315 |
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