Impact of RF Sputtering Power on the Structural and Electrical Properties of Amorphous AZO Thin─Films
In: IEEE 21st International Conference on Sciences and Techniques of Automatic Control and Computer Engineering (STA); (2022-12-19) S. 295-298
Online
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Zugriff:
Titel: |
Impact of RF Sputtering Power on the Structural and Electrical Properties of Amorphous AZO Thin─Films
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Autor/in / Beteiligte Person: | Ferhati, H. ; Kacha, K. ; Bendjerad, A. ; Djeffal, F. ; Benhaya, A. |
Link: | |
Quelle: | IEEE 21st International Conference on Sciences and Techniques of Automatic Control and Computer Engineering (STA); (2022-12-19) S. 295-298 |
Veröffentlichung: | 2022 |
Medientyp: | Konferenz |
ISBN: | 978-1-6654-8261-5 (print) ; 978-1-6654-8260-8 (print) |
ISSN: | 2573-539X (print) |
DOI: | 10.1109/STA56120.2022.10019157 |
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