Multiscale Model of the GaAs MOVPE Process for the Fast Numerical Simulation
In: Chemical Product and Process Modeling, Jg. 3 (2008), Heft 1
Online
academicJournal
Zugriff:
Titel: |
Multiscale Model of the GaAs MOVPE Process for the Fast Numerical Simulation
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Autor/in / Beteiligte Person: | Im, Ik-Tae ; Sugiyama, Masakazu ; Shimogaki, Yukihiro ; Nakano, Yoshyaki |
Link: | |
Zeitschrift: | Chemical Product and Process Modeling, Jg. 3 (2008), Heft 1 |
Veröffentlichung: | 2008 |
Medientyp: | academicJournal |
ISSN: | 1934-2659 (print) |
DOI: | 10.2202/1934-2659.1234 |
Sonstiges: |
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