A study of parasitic reactions between NH3 and TMGa or TMAI
In: Journal of Electronic Materials, Jg. 25 (1996), Heft 6, S. 1004-1008
academicJournal
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A study of parasitic reactions between NH3 and TMGa or TMAI
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Autor/in / Beteiligte Person: | Chen, C. H. ; Liu, H. ; Steigerwald, D. ; Imler, W. ; Kuo, C. P. ; Craford, M. G. ; Ludowise, M. ; Lester, S. ; Amano, J. |
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Zeitschrift: | Journal of Electronic Materials, Jg. 25 (1996), Heft 6, S. 1004-1008 |
Veröffentlichung: | Springer Science and Business Media LLC, 1996 |
Medientyp: | academicJournal |
ISSN: | 0361-5235 |
DOI: | 10.1007/bf02666736 |
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