ChemInform Abstract: Photon Enhancement of Decomposition of AsH3 and TMG.
In: ChemInform ; volume 18, issue 22 ; ISSN 0931-7597 1522-2667, 1987
academicJournal
Zugriff:
In connection with the development of low temp. processing techniques required in the process of manufacturing semiconductor devices the IR spectra of gas species in TMG‐H2 (TMG: trimethyl gallium), TMG‐N2, AsH 3 ‐H2, and TMG‐AsH3‐H2 systems have been measured in a sealed cell before and after irradiation with an excimer laser beam using different lasers, and the photoexcitation effects of each gas system are demonstrated.
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ChemInform Abstract: Photon Enhancement of Decomposition of AsH3 and TMG.
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Autor/in / Beteiligte Person: | NISHIZAWA, J. ; KURABAYASHI, T. ; HOSHINA, J. |
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Zeitschrift: | ChemInform ; volume 18, issue 22 ; ISSN 0931-7597 1522-2667, 1987 |
Veröffentlichung: | Wiley, 1987 |
Medientyp: | academicJournal |
DOI: | 10.1002/chin.198722323 |
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