Lateral Tunnel Epitaxy of GaAs in Lithographically Defined Cavities on 220 nm Silicon-on-Insulator
In: Crystal Growth & Design, Jg. 23 (2023), Heft 11, S. 7821-7828
academicJournal
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Lateral Tunnel Epitaxy of GaAs in Lithographically Defined Cavities on 220 nm Silicon-on-Insulator
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Autor/in / Beteiligte Person: | Yan, Zhao ; Ratiu, Bogdan-Petrin ; Zhang, Weiwei ; Abouzaid, Oumaima ; Ebert, Martin ; Reed, Graham T. ; Thomson, David J. ; Li, Qiang ; Research Councils, UK ; Society, Royal ; Photonics, Rockley ; Future Compound Semiconductor Manufacturing Hub |
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Zeitschrift: | Crystal Growth & Design, Jg. 23 (2023), Heft 11, S. 7821-7828 |
Veröffentlichung: | American Chemical Society (ACS), 2023 |
Medientyp: | academicJournal |
ISSN: | 1528-7483 |
DOI: | 10.1021/acs.cgd.3c00633 |
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