Low frequency noise assessment in advanced UTBOX SOI n-channel MOSFETs
In: Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits ; In Proceedings of EUROSOI'2013 Conference ; 9th Workshop of the Thematic Network on SOI Technology, Devices and Circuits ; https://hal.archives-ouvertes.fr/hal-00994155 ; 9th Workshop of the Thematic Network on SOI Technology, 2013
Online
Konferenz
Zugriff:
International audience ; Low frequency noise measurements were performed in n-channel UTBOX transistors fabricated on silicon on insulator (SOI) substrates. The noise spectra contain 1/f and Lorentzian components; it was found that the carrier number fluctuations are responsible for the 1/f noise; the variation of the low frequency noise versus temperature permits to identify traps in the silicon film and to make a correlation between the observed traps and some technological steps.
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Low frequency noise assessment in advanced UTBOX SOI n-channel MOSFETs
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| Autor/in / Beteiligte Person: | Strobel, V. ; Cretu, Bogdan ; Dos Santos, S.D. ; Simoen, E. ; Routoure, Jean-Marc ; Carin, Régis ; Aoulaiche, M. ; Jurczak, M. ; Martino, J.A. ; Claeys, C. ; Groupe de Recherche en Informatique, Image et Instrumentation de Caen (GREYC) ; Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN) ; Normandie Université (NU)-Normandie Université (NU)-Université de Caen Normandie (UNICAEN) ; Normandie Université (NU) ; (IMEC), IMEC ; Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven) ; Equipe Electronique - Laboratoire GREYC - UMR6072 ; Normandie Université (NU)-Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN) ; E.E. Dept - KU Leuven, Kasteelpark Arenberg - Belgium ; LSI/PSI/USP - University of Sao Paulo - Brazil ; University of Sao Paulo (Brazil) |
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| Zeitschrift: | Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits ; In Proceedings of EUROSOI'2013 Conference ; 9th Workshop of the Thematic Network on SOI Technology, Devices and Circuits ; https://hal.archives-ouvertes.fr/hal-00994155 ; 9th Workshop of the Thematic Network on SOI Technology, 2013 |
| Veröffentlichung: | HAL CCSD, 2013 |
| Medientyp: | Konferenz |
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