First-principles and thermodynamic analysis of trimethylgallium (TMG) decomposition during MOVPE growth of GaN
In: Journal of Crystal Growth ; volume 468, page 950-953 ; ISSN 0022-0248, 2017
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First-principles and thermodynamic analysis of trimethylgallium (TMG) decomposition during MOVPE growth of GaN
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Autor/in / Beteiligte Person: | Sekiguchi, K. ; Shirakawa, H. ; Yamamoto, Y. ; Araidai, M. ; Kangawa, Y. ; Kakimoto, K. ; Shiraishi, K. ; Ministry of Education, Culture, Sports, Science and Technology |
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Zeitschrift: | Journal of Crystal Growth ; volume 468, page 950-953 ; ISSN 0022-0248, 2017 |
Veröffentlichung: | Elsevier BV, 2017 |
Medientyp: | academicJournal |
DOI: | 10.1016/j.jcrysgro.2016.12.044 |
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