Adsorption and decomposition of TMGa on GaAs(100).
In: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 10 (1992-07-01), Heft 4, S. 920-925
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academicJournal
Zugriff:
Titel: |
Adsorption and decomposition of TMGa on GaAs(100).
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Autor/in / Beteiligte Person: | Stienstra, J. ; Lewis, B. S. ; Aarts, J. F. M. |
Link: | |
Zeitschrift: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 10 (1992-07-01), Heft 4, S. 920-925 |
Veröffentlichung: | 1992 |
Medientyp: | academicJournal |
ISSN: | 0734-2101 (print) |
DOI: | 10.1116/1.577878 |
Sonstiges: |
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