Pattern Dependent Modeling for CMP Optimization and Control.
In: MRS Online Proceedings Library; 1999, Vol. 566 Issue 1, p197-209, 13p; Jg. 566 (1999-02-17) 1, S. 197-209
Online
Konferenz
Zugriff:
Titel: |
Pattern Dependent Modeling for CMP Optimization and Control.
|
---|---|
Autor/in / Beteiligte Person: | Boning, D. ; Lee, B. ; Oji, C. ; Ouma, D. ; Park, T. ; Smith, T. ; Tugbawa, T. |
Link: | |
Quelle: | MRS Online Proceedings Library; 1999, Vol. 566 Issue 1, p197-209, 13p; Jg. 566 (1999-02-17) 1, S. 197-209 |
Veröffentlichung: | 1999 |
Medientyp: | Konferenz |
ISSN: | 1946-4274 (print) |
DOI: | 10.1557/PROC-566-197 |
Sonstiges: |
|