Comparison of trimethylgallium and triethylgallium as "Ga" source materials for the growth of ultrathin GaN films on Si (100) substrates via hollow-cathode plasma-assisted atomic layer deposition.
In: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 34 (2016), Heft 1, S. 1A137-1- (6S.)
Online
academicJournal
Zugriff:
GaN films grown by hollow cathode plasma-assisted atomic layer deposition using trimethylgallium (TMG) and triethylgallium (TEG) as gallium precursors are compared. Optimized and saturated TMG/TEG pulse widths were used in order to study the effect of group-III precursors. The films were characterized by grazing incidence x-ray diffraction, atomic force microscopy, x-ray photoelectron spectroscopy, and spectroscopic ellipsometry. Refractive index follows the same trend of crystalline quality, mean grain, and crystallite sizes. GaN layers grown using TMG precursor exhibited improved structural and optical properties when compared to GaN films grown with TEG precursor. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Titel: |
Comparison of trimethylgallium and triethylgallium as "Ga" source materials for the growth of ultrathin GaN films on Si (100) substrates via hollow-cathode plasma-assisted atomic layer deposition.
|
---|---|
Autor/in / Beteiligte Person: | Alevli, Mustafa ; Haider, Ali ; Kizir, Seda ; Leghari, Shahid A. ; Biyikli, Necmi |
Link: | |
Zeitschrift: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 34 (2016), Heft 1, S. 1A137-1- (6S.) |
Veröffentlichung: | 2016 |
Medientyp: | academicJournal |
ISSN: | 0734-2101 (print) |
DOI: | 10.1116/1.4937725 |
Schlagwort: |
|
Sonstiges: |
|