Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition.
In: Scientific reports, Jg. 14 (2024-05-13), Heft 1, S. 10861
Online
academicJournal
Zugriff:
Using our recently developed radical-enhanced metalorganic chemical vapor deposition (REMOCVD) technique, we have grown gallium nitride (GaN) on bulk GaN and GaN on Si templates. Three features make up this system: (1) applying very high-frequency power (60 MHz) to increase the plasma density; (2) introducing H 2 and N 2 gas in the plasma discharge region to produce active NH x radical species in addition to nitrogen radicals; and (3) supplying radicals under remote plasma arrangement with a Faraday cage to suppress charged ions and photons. Using this new REMOCVD system, it was found that high-quality crystals can be grown at lower temperatures than that of MOCVD but the disadvantage was that the growth rate was smaller as 0.2-0.8 μm/h than that by MOCVD. In the present work, we have used a pBN inner shield to prevent the deactivation of radicals to increase the growth rate. The growth conditions such as the plasma power, trimethylgallium (TMG) source flow rate, N 2 + H 2 gas mixture flow rate, and the ratio of N 2 /H 2 were optimized and it was found that the growth rate could be increased up to 3.4 μm/h with remarkably high crystalline quality comparable to that of MOCVD. The XRD-FWHM of GaN grown on the GaN/Si template and the bulk GaN substrate were 977 arcsec and 72 arcsec respectively. This work may be very promising to achieve high-power GaN/GaN devices.
(© 2024. The Author(s).)
Titel: |
Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition.
|
---|---|
Autor/in / Beteiligte Person: | Dhasiyan, AK ; Amalraj, FW ; Jayaprasad, S ; Shimizu, N ; Oda, O ; Ishikawa, K ; Hori, M |
Link: | |
Zeitschrift: | Scientific reports, Jg. 14 (2024-05-13), Heft 1, S. 10861 |
Veröffentlichung: | London : Nature Publishing Group, copyright 2011-, 2024 |
Medientyp: | academicJournal |
ISSN: | 2045-2322 (electronic) |
DOI: | 10.1038/s41598-024-61501-9 |
Sonstiges: |
|