Growth of AlGaN and GaN films on Al<subscript>2</subscript>O<subscript>3</subscript> substrates and the influence of V/III ratio on the properties of GaN films
In: Journal of Crystal Growth, Jg. 286 (2006), Heft 1, S. 28-31
Online
academicJournal
Zugriff:
Abstract: AlGaN and GaN films were grown on Al2O3 substrates at elevated temperatures by alternate supply of trimethylgallium (TMG) with (or without) trimethylaluminum (TMA) in group III flow and NH3 in group V stream. The optical characteristics of GaN films deposited on () Al2O3 substrates were found to be comparable to those of GaN films grown on (0001) Al2O3 substrates under the same growth conditions. It appears that an increment of V/III ratio allows to improve the morphological and optical properties of a GaN film deposited on the () Al2O3 substrate. The best quality GaN films were achieved at a V/III ratio of 10400 with a quenched yellow luminescence and an enhanced room temperature (RT) near band edge photoluminescence (PL) emission having a linewidth of ∼120meV. [Copyright &y& Elsevier]
| Titel: |
Growth of AlGaN and GaN films on Al<subscript>2</subscript>O<subscript>3</subscript> substrates and the influence of V/III ratio on the properties of GaN films
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| Autor/in / Beteiligte Person: | Liao, Wei-Tsai ; Gong, Jyh-Rong ; Lin, Shih-Wei ; Wang, Cheng-Liang ; Lin, Tai-Yuan ; Chen, Keh-Chang ; Cheng, Yi-Cheng ; Lin, Wen-Jen |
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| Zeitschrift: | Journal of Crystal Growth, Jg. 286 (2006), Heft 1, S. 28-31 |
| Veröffentlichung: | 2006 |
| Medientyp: | academicJournal |
| ISSN: | 0022-0248 (print) |
| DOI: | 10.1016/j.jcrysgro.2005.10.001 |
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