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In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). ; https://hal.science/hal-00008732 ; Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)., 1997, Chicago, IL, United States. pp.649-52, ⟨10.1109/SENSOR.1997.613735⟩, 1997KonferenzZugriff:
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In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). ; https://hal.science/hal-00008732 ; Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)., 1997, Chicago, IL, United States. pp.649-52, ⟨10.1109/SENSOR.1997.613735⟩, 1997KonferenzZugriff:
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In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). ; https://hal.archives-ouvertes.fr/hal-00008732 ; Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)., 1997, Chicago, IL, United States. pp.649-52, ⟨10.1109/SENSOR.1997.613735⟩, 1997KonferenzZugriff: